diff --git a/.github/workflows/build.yml b/.github/workflows/build.yml
index aca6a9bf..082e151c 100644
--- a/.github/workflows/build.yml
+++ b/.github/workflows/build.yml
@@ -64,7 +64,7 @@ jobs:
           if (Test-Path build/_deps) { Remove-Item -Recurse -Force build/_deps }
 
       - name: 🏗️ Compile
-        run: cmake -DVIENNAPS_BUILD_TESTS=ON -B build && cmake --build build --config ${{ matrix.config }}
+        run: cmake -DVIENNAPS_BUILD_TESTS=ON -DVIENNAPS_ENABLE_SANITIZER=ON -B build && cmake --build build --config ${{ matrix.config }}
 
       - name: 🧪 Test
         run: ctest -E "Benchmark|Performance" -C ${{ matrix.config }} --test-dir build
\ No newline at end of file
diff --git a/CMakeLists.txt b/CMakeLists.txt
index f604d4df..a91d0fff 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -21,6 +21,8 @@ endif()
 
 option(VIENNAPS_PRECOMPILE_HEADERS "Enable precompiled headers" OFF)
 option(VIENNAPS_STATIC_BUILD "Build ViennaPS as static library" OFF)
+option(VIENNAPS_ENABLE_SANITIZER "Enable sanitizers" OFF)
+option(VIENNAPS_ENABLE_CLANG_TIDY "Run clang-tidy during build" OFF)
 
 option(VIENNAPS_USE_GPU "Enable GPU support" OFF)
 
@@ -68,7 +70,7 @@ if(VIENNAPS_BUILD_PYTHON)
 endif()
 
 if(MSVC)
-  set(CMAKE_CXX_FLAGS "${CMAKE_CXX_FLAGS} -openmp:llvm /bigobj")
+  set(CMAKE_CXX_FLAGS "${CMAKE_CXX_FLAGS} /openmp:llvm /bigobj")
 endif()
 
 # --------------------------------------------------------------------------------------------------------
@@ -105,7 +107,7 @@ include("cmake/cpm.cmake")
 
 CPMAddPackage(
   NAME ViennaCore
-  VERSION 1.9.4
+  VERSION 1.9.5
   GIT_REPOSITORY "https://github.com/ViennaTools/ViennaCore"
   EXCLUDE_FROM_ALL ${VIENNAPS_BUILD_PYTHON}
   OPTIONS "VIENNACORE_USE_GPU ${VIENNAPS_USE_GPU}")
@@ -126,7 +128,8 @@ CPMAddPackage(
   NAME ViennaLS
   VERSION 5.5.0
   GIT_REPOSITORY "https://github.com/ViennaTools/ViennaLS"
-  EXCLUDE_FROM_ALL ${VIENNAPS_BUILD_PYTHON})
+  EXCLUDE_FROM_ALL ${VIENNAPS_BUILD_PYTHON}
+  OPTIONS "VIENNALS_PRECOMPILE_HEADERS ${VIENNAPS_PRECOMPILE_HEADERS}")
 
 CPMAddPackage(
   NAME ViennaCS
@@ -137,6 +140,29 @@ CPMAddPackage(
 target_link_libraries(${PROJECT_NAME} INTERFACE ViennaTools::ViennaCore ViennaTools::ViennaLS
                                                 ViennaTools::ViennaRay ViennaTools::ViennaCS)
 
+# --------------------------------------------------------------------------------------------------------
+# Setup Sanitizer or Clang-Tidy
+# --------------------------------------------------------------------------------------------------------
+
+if(VIENNAPS_ENABLE_SANITIZER)
+  if(VIENNAPS_USE_GPU)
+    message(WARNING "[ViennaPS] Sanitizers cannot be used with GPU support enabled!")
+  else()
+    viennacore_enable_sanitizer()
+    message(STATUS "[ViennaPS] Enabled Sanitizers")
+  endif()
+endif()
+
+if(VIENNAPS_ENABLE_CLANG_TIDY)
+  set(CMAKE_EXPORT_COMPILE_COMMANDS ON)
+  find_program(CLANG_TIDY_EXE NAMES clang-tidy)
+  if(NOT CLANG_TIDY_EXE)
+    message(FATAL_ERROR "clang-tidy not found")
+  endif()
+
+  set(CMAKE_CXX_CLANG_TIDY "${CLANG_TIDY_EXE}" "--quiet" "--warnings-as-errors=*")
+endif()
+
 # --------------------------------------------------------------------------------------------------------
 # Setup Shared/Static Library
 # --------------------------------------------------------------------------------------------------------
@@ -155,8 +181,9 @@ if(VIENNAPS_PRECOMPILE_HEADERS)
   target_link_libraries(${LIB_NAME} PRIVATE ${PROJECT_NAME})
   target_compile_definitions(${LIB_NAME} PRIVATE VIENNAPS_USE_PRECOMPILED=1
                                                  VIENNACORE_COMPILE_SHARED_LIB=1)
-  target_sources(${LIB_NAME} PRIVATE "lib/specMain.cpp" "lib/specGeometries.cpp"
-                                     "lib/specModels.cpp")
+  target_sources(
+    ${LIB_NAME} PRIVATE "lib/specMain.cpp" "lib/specGeometries.cpp" "lib/specModelsEmulation.cpp"
+                        "lib/specModelsSimulation.cpp" "lib/specProcess.cpp")
 
   set_target_properties(
     ${LIB_NAME}
diff --git a/include/viennaps/models/psCF4O2Etching.hpp b/include/viennaps/models/psCF4O2Etching.hpp
index 2a060e09..5dc4cc9a 100644
--- a/include/viennaps/models/psCF4O2Etching.hpp
+++ b/include/viennaps/models/psCF4O2Etching.hpp
@@ -344,7 +344,7 @@ class CF4O2Ion final
   const NumericType sqrt_E_th_ie_C;
   const NumericType sqrt_E_th_ie_Si;
 
-  NumericType E;
+  NumericType E = 0.;
 };
 
 template <typename NumericType, int D>
diff --git a/include/viennaps/models/psDirectionalProcess.hpp b/include/viennaps/models/psDirectionalProcess.hpp
index 926e4b45..ac439ede 100644
--- a/include/viennaps/models/psDirectionalProcess.hpp
+++ b/include/viennaps/models/psDirectionalProcess.hpp
@@ -195,15 +195,6 @@ class DirectionalProcess : public ProcessModelCPU<NumericType, D> {
     // Default surface model
     auto surfModel = SmartPointer<SurfaceModel<NumericType>>::New();
 
-    // Velocity field with multiple rate sets
-    auto velField =
-        SmartPointer<impl::DirectionalVelocityField<NumericType, D>>::New(
-            std::move(rateSets));
-
-    this->setSurfaceModel(surfModel);
-    this->setVelocityField(velField);
-    this->setProcessName("DirectionalProcess");
-
     // Store process data
     processMetaData["DirectionalVelocity"] = std::vector<double>();
     processMetaData["IsotropicVelocity"] = std::vector<double>();
@@ -223,6 +214,15 @@ class DirectionalProcess : public ProcessModelCPU<NumericType, D> {
       processMetaData["Direction " + std::to_string(i++)] = std::vector<double>{
           rateSet.direction[0], rateSet.direction[1], rateSet.direction[2]};
     }
+
+    // Velocity field with multiple rate sets
+    auto velField =
+        SmartPointer<impl::DirectionalVelocityField<NumericType, D>>::New(
+            std::move(rateSets));
+
+    this->setVelocityField(velField);
+    this->setSurfaceModel(surfModel);
+    this->setProcessName("DirectionalProcess");
   }
 
   using ProcessModelCPU<NumericType, D>::processMetaData;
diff --git a/include/viennaps/models/psFluorocarbonEtching.hpp b/include/viennaps/models/psFluorocarbonEtching.hpp
index b4654d79..d9c4061b 100644
--- a/include/viennaps/models/psFluorocarbonEtching.hpp
+++ b/include/viennaps/models/psFluorocarbonEtching.hpp
@@ -346,7 +346,7 @@ class FluorocarbonIon
   const FluorocarbonParameters<NumericType> &p;
   const NumericType A;
   NumericType minEnergy = std::numeric_limits<NumericType>::max();
-  NumericType E;
+  NumericType E = 0.;
 
 public:
   FluorocarbonIon(const FluorocarbonParameters<NumericType> &parameters)
diff --git a/include/viennaps/models/psPlasmaEtching.hpp b/include/viennaps/models/psPlasmaEtching.hpp
index b1d065bf..7dd93ec7 100644
--- a/include/viennaps/models/psPlasmaEtching.hpp
+++ b/include/viennaps/models/psPlasmaEtching.hpp
@@ -327,7 +327,7 @@ class PlasmaEtchingIon
   const NumericType sqrt_E_th_ie_P;
   const NumericType sqrt_E_th_ie_Sub;
 
-  NumericType E;
+  NumericType E = 0.;
 };
 
 template <typename NumericType, int D>
diff --git a/include/viennaps/process/psProcessModel.hpp b/include/viennaps/process/psProcessModel.hpp
index b82274b7..3550a82f 100644
--- a/include/viennaps/process/psProcessModel.hpp
+++ b/include/viennaps/process/psProcessModel.hpp
@@ -169,6 +169,8 @@ class ProcessModelCPU : public ProcessModelBase<NumericType, D> {
   }
 };
 
+PS_PRECOMPILE_PRECISION_DIMENSION(ProcessModelCPU)
+
 } // namespace viennaps
 
 #ifdef VIENNACORE_COMPILE_GPU
@@ -239,5 +241,7 @@ class ProcessModelGPU : public ProcessModelBase<NumericType, D> {
   }
 };
 
+PS_PRECOMPILE_PRECISION_DIMENSION(ProcessModelGPU)
+
 } // namespace viennaps::gpu
 #endif
\ No newline at end of file
diff --git a/include/viennaps/psMaterials.hpp b/include/viennaps/psMaterials.hpp
index 23490026..e69ca772 100644
--- a/include/viennaps/psMaterials.hpp
+++ b/include/viennaps/psMaterials.hpp
@@ -216,6 +216,10 @@ class MaterialMap {
   }
 
   static inline Material mapToMaterial(const int matId) {
+    if (matId < 0 || matId > static_cast<int>(kMaterialMaxId)) {
+      VIENNACORE_LOG_ERROR("Invalid material id " + std::to_string(matId));
+      return Material::GAS;
+    }
     return static_cast<Material>(matId);
   }
 
diff --git a/include/viennaps/psReader.hpp b/include/viennaps/psReader.hpp
index e4246b58..d2c24390 100644
--- a/include/viennaps/psReader.hpp
+++ b/include/viennaps/psReader.hpp
@@ -3,6 +3,7 @@
 #include "psDomain.hpp"
 #include "psPreCompileMacros.hpp"
 
+#include <cstring>
 #include <fstream>
 #include <string>
 #include <utility>
@@ -66,7 +67,7 @@ template <class NumericType, int D> class Reader {
     // Check identifier
     char identifier[8];
     fin.read(identifier, 8);
-    if (std::string(identifier).compare(0, 8, "psDomain")) {
+    if (std::memcmp(identifier, "psDomain", 8) != 0) {
       VIENNACORE_LOG_ERROR(
           "Reading domain from stream failed. Header could not be found.");
       return;
diff --git a/include/viennaps/psVTKRenderWindow.hpp b/include/viennaps/psVTKRenderWindow.hpp
index 4f3ac8e1..32abd77a 100644
--- a/include/viennaps/psVTKRenderWindow.hpp
+++ b/include/viennaps/psVTKRenderWindow.hpp
@@ -626,7 +626,7 @@ class Custom3DInteractorStyle : public vtkInteractorStyleTrackballCamera {
 
 private:
   viennaps::VTKRenderWindow<double, 3> *Window = nullptr;
-}; // namespace viennaps
+};
 
 // vtkStandardNewMacro(Custom3DInteractorStyle);
 
@@ -651,7 +651,7 @@ class Custom2DInteractorStyle : public vtkInteractorStyleImage {
 
 private:
   viennaps::VTKRenderWindow<double, 2> *Window = nullptr;
-}; // namespace viennaps
+};
 
 // vtkStandardNewMacro(Custom2DInteractorStyle);
 
diff --git a/lib/specMain.cpp b/lib/specMain.cpp
index fc9825b7..f27aa225 100644
--- a/lib/specMain.cpp
+++ b/lib/specMain.cpp
@@ -1,9 +1,6 @@
 #include <gds/psGDSGeometry.hpp>
 #include <gds/psGDSReader.hpp>
 
-#include <process/psProcess.hpp>
-#include <process/psProcessModel.hpp>
-
 #include <psDomain.hpp>
 #include <psDomainSetup.hpp>
 #include <psExtrude.hpp>
@@ -16,16 +13,16 @@
 
 #include <lsPreCompileMacros.hpp>
 
+#ifdef VIENNACORE_COMPILE_GPU
 // this include may only appear in a single source file:
 #include <optix_function_table_definition.h>
+#endif
 
 namespace viennaps {
 
 // Precompile specializations for commonly used classes
 PRECOMPILE_SPECIALIZE(Domain)
-PRECOMPILE_SPECIALIZE(Process)
 PRECOMPILE_SPECIALIZE(Planarize)
-PRECOMPILE_SPECIALIZE(ProcessModelCPU)
 PRECOMPILE_SPECIALIZE(Reader)
 PRECOMPILE_SPECIALIZE(Writer)
 PRECOMPILE_SPECIALIZE(GDSGeometry)
diff --git a/lib/specModelsEmulation.cpp b/lib/specModelsEmulation.cpp
new file mode 100644
index 00000000..16d91ec8
--- /dev/null
+++ b/lib/specModelsEmulation.cpp
@@ -0,0 +1,24 @@
+#include <models/psCSVFileProcess.hpp>
+#include <models/psDirectionalProcess.hpp>
+#include <models/psGeometricDistributionModels.hpp>
+#include <models/psIsotropicProcess.hpp>
+#include <models/psSelectiveEpitaxy.hpp>
+#include <models/psWetEtching.hpp>
+
+namespace viennaps {
+
+// Precompile specializations for process models
+// Emulation Models
+PRECOMPILE_SPECIALIZE(CSVFileProcess)
+PRECOMPILE_SPECIALIZE(DirectionalProcess)
+PRECOMPILE_SPECIALIZE(IsotropicProcess)
+
+// Geometric Models
+PRECOMPILE_SPECIALIZE(BoxDistribution)
+PRECOMPILE_SPECIALIZE(SphereDistribution)
+
+// Crystal Anisotropy Models
+PRECOMPILE_SPECIALIZE(SelectiveEpitaxy)
+PRECOMPILE_SPECIALIZE(WetEtching)
+
+} // namespace viennaps
\ No newline at end of file
diff --git a/lib/specModels.cpp b/lib/specModelsSimulation.cpp
similarity index 65%
rename from lib/specModels.cpp
rename to lib/specModelsSimulation.cpp
index 75b8f1d6..66d9b52c 100644
--- a/lib/specModels.cpp
+++ b/lib/specModelsSimulation.cpp
@@ -1,35 +1,19 @@
 #include <models/psCF4O2Etching.hpp>
-#include <models/psCSVFileProcess.hpp>
-#include <models/psDirectionalProcess.hpp>
 #include <models/psFaradayCageEtching.hpp>
 #include <models/psFluorocarbonEtching.hpp>
-#include <models/psGeometricDistributionModels.hpp>
 #include <models/psHBrO2Etching.hpp>
 #include <models/psIonBeamEtching.hpp>
-#include <models/psIsotropicProcess.hpp>
 #include <models/psMultiParticleProcess.hpp>
 #include <models/psOxideRegrowth.hpp>
 #include <models/psSF6C4F8Etching.hpp>
 #include <models/psSF6O2Etching.hpp>
-#include <models/psSelectiveEpitaxy.hpp>
 #include <models/psSingleParticleALD.hpp>
 #include <models/psSingleParticleProcess.hpp>
 #include <models/psTEOSDeposition.hpp>
 #include <models/psTEOSPECVD.hpp>
-#include <models/psWetEtching.hpp>
 
 namespace viennaps {
 
-// Precompile specializations for process models
-// Emulation Models
-PRECOMPILE_SPECIALIZE(CSVFileProcess)
-PRECOMPILE_SPECIALIZE(DirectionalProcess)
-PRECOMPILE_SPECIALIZE(IsotropicProcess)
-
-// Geometric Models
-PRECOMPILE_SPECIALIZE(BoxDistribution)
-PRECOMPILE_SPECIALIZE(SphereDistribution)
-
 // Plasma Etching Models
 PRECOMPILE_SPECIALIZE(CF4O2Etching)
 PRECOMPILE_SPECIALIZE(HBrO2Etching)
@@ -49,10 +33,6 @@ PRECOMPILE_SPECIALIZE(TEOSPECVD)
 PRECOMPILE_SPECIALIZE(FaradayCageEtching)
 PRECOMPILE_SPECIALIZE(IonBeamEtching)
 
-// Crystal Anisotropy Models
-PRECOMPILE_SPECIALIZE(SelectiveEpitaxy)
-PRECOMPILE_SPECIALIZE(WetEtching)
-
 // Atomic Layer Processing Models
 PRECOMPILE_SPECIALIZE(SingleParticleALD)
 
diff --git a/lib/specProcess.cpp b/lib/specProcess.cpp
new file mode 100644
index 00000000..f40a5467
--- /dev/null
+++ b/lib/specProcess.cpp
@@ -0,0 +1,18 @@
+#include <process/psProcess.hpp>
+#include <process/psProcessModel.hpp>
+
+#include <lsPreCompileMacros.hpp>
+
+namespace viennaps {
+
+// Precompile specializations for commonly used classes
+PRECOMPILE_SPECIALIZE(Process)
+PRECOMPILE_SPECIALIZE(ProcessModelCPU)
+
+#ifdef VIENNACORE_COMPILE_GPU
+namespace gpu {
+PRECOMPILE_SPECIALIZE(ProcessModelGPU)
+} // namespace gpu
+#endif
+
+} // namespace viennaps